ULVAC爱发科 气体分析仪 HGM2-302

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ULVAC爱发科 气体分析仪 HGM2-302

ULVAC爱发科 气体分析仪 HGM2-302

ULVAC爱发科 气体分析仪 HGM2-302ULVAC爱发科 气体分析仪 HGM2-302规格ModelHGM2-202HGM2-302Mass filter typeQuadrupoleMass range1 ~ 200 amu1 ~ 300 amuResolutionM/ ΔM=1M(10% P.H.)Detector typeFaraday cupSEMFaraday cupSEMSensitivity2.510-6 A/Pa @1…

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ULVAC爱发科    气体分析仪   HGM2-302

ULVAC爱发科    气体分析仪   HGM2-302




规格


ModelHGM2-202HGM2-302
Mass filter typeQuadrupole
Mass range1 ~ 200 amu1 ~ 300 amu
ResolutionM/ ΔM=1M(10% P.H.)
Detector typeFaraday cupSEMFaraday cupSEM
Sensitivity2.5×10-6 A/Pa @1.0A/Pa4 A/Pa2.0×10-6 A/Pa @1.0A/Pa4 A/Pa
3.3×10-4 A/Torr533 A/Torr3.3×10-4 A/Torr533 A/Torr
2.5×10-4 A/mbar400 A/mbar2.5×10-4 A/mbar400 A/mbar
Minimum datectable partial pressureApprox. 10-9PaApprox. 10-13PaApprox. 10-9PaApprox. 10-13Pa
Approx. 7.5×10-12 TorrApprox. 7.5×10-16 TorrApprox. 7.5×10-12 TorrApprox. 7.5×10-16 Torr
Approx. 1×10-11 mbarApprox. 1×10-12 mbarApprox. 1×10-11 mbarApprox. 1×10-12 mbar
Maximum operating pressure1×10-2 Pa
7.5×10-3 Torr
1×10-4 mbar
Filamentlr / Y2O3 , 2pcs
Ionizing voltage25 ~ 70 eV(defalut:70eV)
Emission current0.1mA/0.5mA/1.0mA(default:0.5mA)
DEGASElectron bombard type 330V, 5mA
Total pressure functionCapable / 10-2 ~ 10-5Pa
"One Click" functionCapable / He / H2O / N2 / O2 / Any gas
"One Click" leak test functionCapable
Power inputDC24V±10% 50W
Weight(sensor unit / sensor)2.4kg/0.81kg
Maximum sensor operating temperature250℃(482°F)
Maximum bakeout temperature
(elsectronisc removed)		300℃(572°F)
Operating temperature range10 to 40℃(50 to 104°F)
Operating humigity range15 ~ 80%(not condensing)
IP ratingIP30(sensor unit)
Power connectorMSTBV2.5/3-STF-5.08
Communication interfaceEthernet compatible
External input / output connectorD-sub15-pin (M2.6 screw)(eith option)
Communication connectorRJ45
External input / output signalAnalog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
SoftwareQulee QCS Ver.4.2以降（Windows 8/10/11）适用
Standard accessoriesPower connector, LAN cable (3m long),Software (install CD),Instruction manual (CD)
Option accessories
(cf. Qulee optional catalogue)		LAN cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case
Applicable standardCE

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.